- Patent Title: Semiconductor memory device capable of suppressing leakage current
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Application No.: US16807230Application Date: 2020-03-03
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Publication No.: US11239317B2Publication Date: 2022-02-01
- Inventor: Shoichi Watanabe , Mitsuhiro Noguchi
- Applicant: Kioxia Corporation
- Applicant Address: JP Minato-ku
- Assignee: Kioxia Corporation
- Current Assignee: Kioxia Corporation
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JPJP2019-163798 20190909
- Main IPC: H01L29/08
- IPC: H01L29/08 ; H01L27/092 ; H01L27/11573 ; H01L29/34 ; H01L21/8238 ; H01L21/8234 ; H01L27/11582 ; H01L27/11551 ; H01L27/1157 ; H01L27/11524 ; H01L27/11578 ; G11C16/30

Abstract:
According to a certain embodiment, the nonvolatile semiconductor memory device includes: a first conductivity-type semiconductor substrate including a crushed layer on a back side surface thereof; a memory cell array disposed on a front side surface of the semiconductor substrate opposite to the crushed layer; and a first conductivity-type high voltage transistor HVP disposed on the semiconductor substrate and including a first conductivity-type channel, configured to supply a high voltage to the memory cell array. The first conductivity-type high voltage transistor includes: a well region NW disposed on the surface of the semiconductor substrate and having a second conductivity type; a source region and a drain region disposed in the well region; and a first conductivity-type first high concentration layer WT2 disposed between the crushed layer of the semiconductor substrate and the well region and having a higher concentration than an impurity concentration of the semiconductor substrate.
Public/Granted literature
- US20210074811A1 SEMICONDUCTOR DEVICE Public/Granted day:2021-03-11
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