Invention Grant
- Patent Title: Method of producing a composite substrate
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Application No.: US16148448Application Date: 2018-10-01
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Publication No.: US11239405B2Publication Date: 2022-02-01
- Inventor: Tomoyoshi Tai , Yuji Hori , Takahiro Yamadera , Ryosuke Hattori , Kengo Suzuki
- Applicant: NGK INSULATORS, LTD. , NGK CERAMIC DEVICE CO., LTD.
- Applicant Address: JP Aichi; JP Aichi
- Assignee: NGK INSULATORS, LTD.,NGK CERAMIC DEVICE CO., LTD.
- Current Assignee: NGK INSULATORS, LTD.,NGK CERAMIC DEVICE CO., LTD.
- Current Assignee Address: JP Aichi; JP Aichi
- Agency: Cermak Nakajima & McGowan LLP
- Agent Tomoko Nakajima
- Priority: JP2013-154505 20130725
- Main IPC: H01L41/08
- IPC: H01L41/08 ; H03H3/10 ; H03H9/02 ; H01L41/312 ; H01L41/332 ; H01L41/277 ; H01L41/311 ; H01L41/25 ; H03H3/04

Abstract:
Described herein is a method of bonding a piezoelectric substrate to a support substrate to form a composite substrate. The piezoelectric substrate has one surface which is positively polarized, and a second surface which is negatively polarized. The method described herein includes the steps of bonding the positively polarized surface of the piezoelectric substrate to one surface of the support substrate by a direct bonding method.
Public/Granted literature
- US20190036000A1 Composite Substrate and Method of Producing the Same Public/Granted day:2019-01-31
Information query
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