Invention Grant
- Patent Title: Physical unclonable function for MRAM structures
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Application No.: US16828252Application Date: 2020-03-24
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Publication No.: US11239414B2Publication Date: 2022-02-01
- Inventor: Ruilong Xie , Alexander Reznicek , Oscar van der Straten , Koichi Motoyama
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Otterstedt, Wallace & Kammer, LLP
- Agent L. Jeffrey Kelly
- Main IPC: H01L43/12
- IPC: H01L43/12 ; H01L43/02 ; H01L27/22 ; H04L9/32 ; H01L43/08

Abstract:
An integrated circuit including a memory array and a physical unclonable function array is obtained by causing metal back sputtering in specific regions of the integrated circuit during ion beam etch. MRAM pillars within the memory array have larger widths than the underlying bottom electrodes while those within the physical unclonable function array have smaller widths than the underlying bottom electrodes. Metal residue deposited over tunnel barrier layers causes random electrical shorting of some of the MRAM pillars within the physical unclonable function array.
Public/Granted literature
- US20210305499A1 PHYSICAL UNCLONABLE FUNCTION FOR MRAM STRUCTURES Public/Granted day:2021-09-30
Information query
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