Invention Grant
- Patent Title: Support base
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Application No.: US16246724Application Date: 2019-01-14
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Publication No.: US11241770B2Publication Date: 2022-02-08
- Inventor: Sakae Matsuzaki
- Applicant: DISCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: DISCO CORPORATION
- Current Assignee: DISCO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Greer Burns & Crain, Ltd.
- Priority: JPJP2018-005826 20180117
- Main IPC: B24B41/06
- IPC: B24B41/06 ; B23Q17/20 ; B24B49/14 ; B24B37/30 ; B24B27/00 ; B24B7/22

Abstract:
A support base supports a plate-shaped workpiece. The support base includes a flat plate-shaped box member having a support face for supporting a workpiece and a placement face that is a face on the opposite side to the support face and is placed on a holding face of a chuck table, a temperature measurement unit accommodated in the box member, and a battery accommodated in the box member and serving as a power supply for the temperature measurement unit. The temperature measurement unit includes a temperature measuring instrument that measures a temperature at the support face, and a recording unit that records the temperature measured by the temperature measuring instrument.
Public/Granted literature
- US20190217440A1 SUPPORT BASE Public/Granted day:2019-07-18
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