Invention Grant
- Patent Title: Integrating 3D printing into multi-process fabrication schemes
-
Application No.: US16289213Application Date: 2019-02-28
-
Publication No.: US11241839B2Publication Date: 2022-02-08
- Inventor: William H. McClintock , Rajeev Bajaj , Jason G. Fung , Daniel Redfield
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan LLP
- Main IPC: B29C64/00
- IPC: B29C64/00 ; B29C64/393 ; G01B9/02 ; G06F9/30 ; B33Y50/02

Abstract:
Embodiments disclosed herein provide methods of forming bond pad redistribution layers (RDLs) in a fan-out wafer level packaging (FOWLP) scheme using an additive manufacturing process. In one embodiment, a method of forming a redistribution layer includes positioning a carrier substrate on a manufacturing support of an additive manufacturing system, the carrier substrate including a plurality of singulated devices, detecting one or more fiducial features corresponding to each of the plurality of singulated devices, determining actual positions of each of the plurality of singulated devices relative to one or more components of the additive manufacturing system, generating printing instructions for forming a patterned dielectric layer based on the actual positions of each of the plurality of singulated devices, and forming the patterned dielectric layer using the printing instructions.
Public/Granted literature
- US20190299537A1 INTEGRATING 3D PRINTING INTO MULTI-PROCESS FABRICATION SCHEMES Public/Granted day:2019-10-03
Information query