Invention Grant
- Patent Title: Film forming method
-
Application No.: US16304196Application Date: 2018-04-13
-
Publication No.: US11242596B2Publication Date: 2022-02-08
- Inventor: Guangfei Chen , Dagang Liu , Feng Liu
- Applicant: BOE TECHNOLOGY GROUP CO., LTD. , HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Applicant Address: CN Beijing; CN Anhui
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.,HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.,HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Current Assignee Address: CN Beijing; CN Anhui
- Agency: Nath, Goldberg & Meyer
- Agent Joshua B. Goldberg
- Priority: CN201720660632.X 20170608
- International Application: PCT/CN2018/082959 WO 20180413
- International Announcement: WO2018/223770 WO 20181213
- Main IPC: C23C14/34
- IPC: C23C14/34 ; C23C14/56

Abstract:
The present disclosure discloses a film-forming device belongs to the field of film forming technology comprising: a film-forming chamber configured to form a film on a substrate disposed inside the film-forming chamber; a transfer assembly configured to transport a shielding plate into the film-forming chamber along a conveying path, move the shielding plate to a first position, and remove the shielding plate from the film-forming chamber along the conveying path; and a cleaning assembly disposed at the conveying path outside the film-forming chamber for cleaning the shielding plate removed from the film-forming chamber.
Public/Granted literature
- US20210222287A1 FILM FORMING METHOD Public/Granted day:2021-07-22
Information query
IPC分类: