Invention Grant
- Patent Title: Plating method, bubble ejection member, plating apparatus, and device
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Application No.: US16757109Application Date: 2018-10-17
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Publication No.: US11242610B2Publication Date: 2022-02-08
- Inventor: Yoko Yamanishi , Yudai Fukuyama , Keita Ichikawa
- Applicant: KYUSHU UNIVERSITY, NATIONAL UNIVERSITY CORPORATION
- Applicant Address: JP Fukuoka
- Assignee: KYUSHU UNIVERSITY, NATIONAL UNIVERSITY CORPORATION
- Current Assignee: KYUSHU UNIVERSITY, NATIONAL UNIVERSITY CORPORATION
- Current Assignee Address: JP Fukuoka
- Agency: McDermott Will & Emery LLP
- Priority: JPJP2017-202994 20171019
- International Application: PCT/JP2018/038580 WO 20181017
- International Announcement: WO2019/078229 WO 20190425
- Main IPC: C23C18/16
- IPC: C23C18/16 ; B05B17/06 ; C25D5/00

Abstract:
A method that can plate a predetermined position on various plating targets without implementing a pretreatment thereon is provided. A plating method is performed on a plating target using a plating solution, and the plating method includes at least a bubble ejection step of ejecting a bubble generated by a bubble ejection member to a plating solution. The bubble ejection member includes an electrode formed of a conductive material and an insulating material covering at least a part of the electrode, at least a part of the insulating material forms a bubble ejection port, and an air gap surrounded by the insulating material is formed between at least a part of the electrode and the bubble ejection port.
Public/Granted literature
- US20200240031A1 PLATING METHOD, BUBBLE EJECTION MEMBER, PLATING APPARATUS, AND DEVICE Public/Granted day:2020-07-30
Information query
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