Invention Grant
- Patent Title: Method for producing silicon single crystal
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Application No.: US16471219Application Date: 2017-10-30
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Publication No.: US11242617B2Publication Date: 2022-02-08
- Inventor: Koichi Maegawa , Yasuhito Narushima , Yasufumi Kawakami , Fukuo Ogawa
- Applicant: SUMCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: SUMCO CORPORATION
- Current Assignee: SUMCO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Greenblum & Bernstein, P.L.C.
- Priority: JPJP2016-246519 20161220
- International Application: PCT/JP2017/039028 WO 20171030
- International Announcement: WO2018/116637 WO 20180628
- Main IPC: C30B15/30
- IPC: C30B15/30 ; C30B15/20 ; C30B29/06 ; C30B15/04

Abstract:
A silicon single crystal production method includes pulling up and growing a silicon single crystal from silicon melt containing red phosphorus as a dopant by Czochralski process. The silicon single crystal is intended for a 200-mm-diameter wafer. The silicon single crystal includes a straight body with a diameter in a range from 201 mm to 230 mm. The straight body includes a straight-body start portion with an electrical resistivity in a range from 0.8 mΩcm to 1.2 mΩcm. A crystal rotation speed of the silicon single crystal is controlled to fall within a range from 17 rpm to 40 rpm for at least part of a shoulder-formation step for the silicon single crystal.
Public/Granted literature
- US20200087814A1 METHOD FOR PRODUCING SILICON SINGLE CRYSTAL Public/Granted day:2020-03-19
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