Invention Grant
- Patent Title: Seal structure and seal method
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Application No.: US16353479Application Date: 2019-03-14
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Publication No.: US11242930B2Publication Date: 2022-02-08
- Inventor: Ryota Sakane
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Weihrouch IP
- Priority: JPJP2018-049647 20180316
- Main IPC: F16J15/02
- IPC: F16J15/02

Abstract:
A seal structure includes an elastic body and a cap which are located in a boundary between a first component and a second component that seal and define a gas flow path. The flow path is defined by a first through hole in the first component and a second through hole in the second component, the elastic body has a loop-shaped second opening which overlaps with a first opening of the first through hole, and the cap covers the elastic body such that the first opening, the second opening, and a third opening of the cap overlap with each other. The cap is fitted into a groove in the first surface and is in close contact with the second surface. The cap and second component are in close contact with each other to have slidability.
Public/Granted literature
- US20190285177A1 SEAL STRUCTURE AND SEAL METHOD Public/Granted day:2019-09-19
Information query
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