Invention Grant
- Patent Title: Encoder apparatus, drive apparatus, stage apparatus, and robot apparatus
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Application No.: US16036380Application Date: 2018-07-16
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Publication No.: US11243096B2Publication Date: 2022-02-08
- Inventor: Masahiko Goto
- Applicant: NIKON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: NIKON CORPORATION
- Current Assignee: NIKON CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JPJP2016-007468 20160118
- Main IPC: G01D5/34
- IPC: G01D5/34 ; G01D5/347 ; B25J19/02 ; G01D5/244 ; G01D5/56 ; G01D5/58 ; G01D5/14

Abstract:
Provided is an encoder apparatus capable of reducing frequency of maintenance of a battery. An encoder apparatus includes: a position detection system including a detector that detects position information on a mover; an electric signal generator that generates an electric signal in response to movement of the mover; and a battery that supplies at least a part of power consumed by the position detection system in accordance with the electric signal generated by the electric signal generator.
Public/Granted literature
- US20180340800A1 ENCODER APPARATUS, DRIVE APPARATUS, STAGE APPARATUS, AND ROBOT APPARATUS Public/Granted day:2018-11-29
Information query
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