Force sensor and force sensor manufacturing method
Abstract:
A force sensor that is a MEMS sensor includes: a plurality of detectors arranged in a circle and each including an element disposed in part of a surface layer of a base component including a semiconductor; an elastic component including resin and disposed sandwiching the plurality of detectors from both sides; and a probe that is connected to an end of each of the plurality of detectors at a center portion of the circle in which the plurality of detectors are arranged, extends up to a position that protrudes from the elastic component, and to which force is applicable directly without passing the elastic component.
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