Silicon nanotube sensor and method of manufacture
Abstract:
A sensor includes a substrate and a nanotube structure formed on top of the substrate. A body is formed on top of the substrate and surrounds the nanotube structure. A source contact is electrically coupled to a top portion of the nanotube structure. A drain contact is arranged on top of the substrate and is electrically coupled with a bottom portion of the nanotube structure. A gate contact is arranged on top of the nanotube structure. The gate contact is electrically is isolated from the top portion of the nanotube structure and electrically coupled with a middle portion of the nanotube structure. The top portion of the nanotube structure is exposed to an environment surrounding the sensor.
Public/Granted literature
Information query
Patent Agency Ranking
0/0