Invention Grant
- Patent Title: Silicon nanotube sensor and method of manufacture
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Application No.: US16771040Application Date: 2018-12-13
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Publication No.: US11243185B2Publication Date: 2022-02-08
- Inventor: Muhammad Mustafa Hussain
- Applicant: KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Applicant Address: SA Thuwal
- Assignee: KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Current Assignee: KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Current Assignee Address: SA Thuwal
- Agency: Patent Portfolio Builders PLLC
- International Application: PCT/IB2018/060035 WO 20181213
- International Announcement: WO2019/123142 WO 20190627
- Main IPC: G01N27/414
- IPC: G01N27/414 ; H01L29/06

Abstract:
A sensor includes a substrate and a nanotube structure formed on top of the substrate. A body is formed on top of the substrate and surrounds the nanotube structure. A source contact is electrically coupled to a top portion of the nanotube structure. A drain contact is arranged on top of the substrate and is electrically coupled with a bottom portion of the nanotube structure. A gate contact is arranged on top of the nanotube structure. The gate contact is electrically is isolated from the top portion of the nanotube structure and electrically coupled with a middle portion of the nanotube structure. The top portion of the nanotube structure is exposed to an environment surrounding the sensor.
Public/Granted literature
- US20210172906A1 SILICON NANOTUBE SENSOR AND METHOD OF MANUFACTURE Public/Granted day:2021-06-10
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