Invention Grant
- Patent Title: Template with mass velocity variation features, nanoimprint lithography apparatus that uses the template, and methods that use the template
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Application No.: US16264214Application Date: 2019-01-31
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Publication No.: US11243466B2Publication Date: 2022-02-08
- Inventor: Amir Tavakkoli Kermani Ghariehali
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agent Daniel Ratoff
- Main IPC: G03F7/00
- IPC: G03F7/00 ; B29C59/02 ; B29C64/20
Abstract:
An imprinting apparatus, a method of manufacturing an article, with a template having at least one mass velocity variation feature in a region that alters the filling rate of formable material in the second region surrounding a pattern region. The altered filling rate varies from a first filling rate, at a center of an outer edge of the region to a second filling rate, at corners of the outer edge of the region. The second filling rate is greater than the first filling rate.
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