Invention Grant
- Patent Title: Composition for resist underlayer film formation, resist underlayer film and formation method thereof, and patterned substrate production method
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Application No.: US16564499Application Date: 2019-09-09
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Publication No.: US11243468B2Publication Date: 2022-02-08
- Inventor: Naoya Nosaka , Goji Wakamatsu , Tsubasa Abe , Ichihiro Miura , Kengo Ehara , Hiroki Nakatsu , Hiroki Nakagawa
- Applicant: JSR CORPORATION
- Applicant Address: JP Tokyo
- Assignee: JSR CORPORATION
- Current Assignee: JSR CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Element IP, PLC
- Priority: JPJP2017-046092 20170310
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G03F7/038 ; G03F7/09 ; C08G61/12 ; G03F7/039 ; C08G61/04

Abstract:
A composition for resist underlayer film formation contains: a compound having a partial structure represented by the following formula (1); and a solvent. In the formula (1): X represents a group represented by formula (i), (ii), (iii) or (iv). In the formula (i): R1 and R2 each independently represent a hydrogen atom, a substituted or unsubstituted monovalent aliphatic hydrocarbon group having 1 to 20 carbon atoms, or a substituted or unsubstituted aralkyl group having 7 to 20 carbon atoms provided that at least one of R1 and R2 represents the substituted or unsubstituted monovalent aliphatic hydrocarbon group having 1 to 20 carbon atoms or the substituted or unsubstituted aralkyl group having 7 to 20 carbon atoms; or R1 and R2 taken together represent a part of a ring structure having 3 to 20 ring atoms together with the carbon atom to which R1 and R2 bond.
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