Invention Grant
- Patent Title: Bond pad with enhanced reliability
-
Application No.: US16866752Application Date: 2020-05-05
-
Publication No.: US11244914B2Publication Date: 2022-02-08
- Inventor: Tzu-Hsuan Yeh , Chern-Yow Hsu
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L21/308

Abstract:
The present disclosure, in some embodiments, relates to a method of forming an integrated chip. The method may be performed by forming a bond pad layer onto a dielectric structure formed over a substrate. The dielectric structure surrounds a plurality of interconnect layers. A protective layer is formed onto the bond pad layer, and the bond pad layer and the protective layer are patterned to define a bond pad covered by the protective layer. One or more upper passivation layers are formed over the protective layer. A dry etching process is performed to form an opening extending through the one or more upper passivation layers to the protective layer. A wet etching process is performed to remove a part of the protective layer and expose an upper surface of the bond pad.
Public/Granted literature
- US20210351142A1 BOND PAD WITH ENHANCED RELIABILITY Public/Granted day:2021-11-11
Information query
IPC分类: