Invention Grant
- Patent Title: Deep trench isolation (DTI) structure for CMOS image sensor
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Application No.: US16720236Application Date: 2019-12-19
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Publication No.: US11244979B2Publication Date: 2022-02-08
- Inventor: Hui Zang , Gang Chen
- Applicant: OMNIVISION TECHNOLOGIES, INC.
- Applicant Address: US CA Santa Clara
- Assignee: OMNIVISION TECHNOLOGIES, INC.
- Current Assignee: OMNIVISION TECHNOLOGIES, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Christensen O'Connor Johnson Kindness PLLC
- Main IPC: H01L27/146
- IPC: H01L27/146

Abstract:
A semiconductor structure for a CMOS image sensor includes a semiconductor substrate having a first side and a second side. A photodiode is disposed in the semiconductor substrate proximate to the first side. The photodiode accumulates image charge photogenerated in the photodiode in response to incident light directed through the second side. A deep trench isolation structure enclosing the photodiode. The deep trench isolation structure extends from the second side toward the first side. The deep trench isolation structure includes a light absorption region disposed at a first end of the deep trench isolation structure toward the first side.
Public/Granted literature
- US20210193702A1 DEEP TRENCH ISOLATION (DTI) STRUCTURE FOR CMOS IMAGE SENSOR Public/Granted day:2021-06-24
Information query
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