Invention Grant
- Patent Title: Structure and formation method of semiconductor device with metal gate stack
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Application No.: US16548483Application Date: 2019-08-22
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Publication No.: US11245029B2Publication Date: 2022-02-08
- Inventor: Wang-Chun Huang , Ching-Wei Tsai , Kuan-Lun Cheng , Chih-Hao Wang
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/78

Abstract:
A structure and formation method of a semiconductor device is provided. The method includes forming a semiconductor stack having first sacrificial layers and first semiconductor layers laid out alternately. The method also includes patterning the semiconductor stack to form a first fin structure and a second fin structure. The method further includes replacing the second fin structure with a third fin structure having second sacrificial layers and second semiconductor layers laid out alternately. In addition, the method includes removing the first sacrificial layers in the first fin structure and the second sacrificial layers in the third fin structure. The method includes forming a first metal gate stack and a second metal gate stack to wrap around each of the first semiconductor layers in the first fin structure and each of the second semiconductor layers in the third fin structure, respectively.
Public/Granted literature
- US20210057541A1 STRUCTURE AND FORMATION METHOD OF SEMICONDUCTOR DEVICE WITH METAL GATE STACK Public/Granted day:2021-02-25
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