Invention Grant
- Patent Title: Apparatus and circuits including transistors with different polarizations and methods of fabricating the same
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Application No.: US16601790Application Date: 2019-10-15
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Publication No.: US11245030B2Publication Date: 2022-02-08
- Inventor: Chan-Hong Chern
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Duane Morris LLP
- Main IPC: H01L29/778
- IPC: H01L29/778 ; H01L27/085 ; H01L29/66 ; H01L29/205

Abstract:
Apparatus and circuits including transistors with different polarizations and methods of fabricating the same are disclosed. In one example, a semiconductor structure is disclosed. The semiconductor structure includes: a substrate; an active layer that is formed over the substrate and comprises a first active portion and a second active portion; a first transistor comprising a first source region, a first drain region, and a first gate structure formed over the first active portion and between the first source region and the first drain region; and a second transistor comprising a second source region, a second drain region, and a second gate structure formed over the second active portion and between the second source region and the second drain region, wherein the first active portion has a material composition different from that of the second active portion.
Public/Granted literature
Information query
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