Invention Grant
- Patent Title: Vertical multi-gate thin film transistors
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Application No.: US16490503Application Date: 2017-03-30
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Publication No.: US11245038B2Publication Date: 2022-02-08
- Inventor: Yih Wang , Abhishek Sharma , Sean Ma , Van H. Lee
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Essential Patent Group, LLP
- International Application: PCT/US2017/024969 WO 20170330
- International Announcement: WO2018/182609 WO 20181004
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L27/108 ; H01L29/66

Abstract:
Vertical thin film transistors (TFTs) including a gate electrode pillar clad with a gate dielectric. The gate dielectric is further clad with a semiconductor layer. Source or drain metallization is embedded in trenches formed in an isolation dielectric adjacent to separate regions of the semiconductor layer. During TFT operation, biasing of the gate electrode can induce one or more transistor channel within the semiconductor layer, electrically coupling together the source and drain metallization. A width of the channel may be proportional to a height of the gate electrode pillar clad by the semiconductor layer, while a length of the channel may be proportional to the spacing between contacts occupied by the semiconductor layer. In some embodiments, a memory device may include cells comprising a vertical thin film select transistor and a capacitor (1TFT-1C).
Public/Granted literature
- US20200044095A1 VERTICAL MULTI-GATE THIN FILM TRANSISTORS Public/Granted day:2020-02-06
Information query
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