- Patent Title: Semiconductor device and semiconductor device manufacturing method
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Application No.: US16274725Application Date: 2019-02-13
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Publication No.: US11245063B2Publication Date: 2022-02-08
- Inventor: Kensuke Nagata , Katsutoshi Narita
- Applicant: DENSO CORPORATION
- Applicant Address: JP Kariya
- Assignee: DENSO CORPORATION
- Current Assignee: DENSO CORPORATION
- Current Assignee Address: JP Kariya
- Agency: Oliff PLC
- Priority: JP2016-150306 20160729
- Main IPC: H01L31/00
- IPC: H01L31/00 ; H01L35/34 ; H01L35/22 ; H01L35/02 ; H01L23/34 ; H01L27/16

Abstract:
A semiconductor device includes a semiconductor substrate, a polysilicon layer fixed to the semiconductor substrate, and a silicon nitride layer in contact with the polysilicon layer, wherein the polysilicon layer includes an n-type layer and a p-type layer in contact with the n-type layer; a semiconductor device manufacturing method includes forming the polysilicon layer covering at least one hydrogen-containing layer, and heating the polysilicon layer and the hydrogen-containing layer.
Public/Granted literature
- US20190181324A1 SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD Public/Granted day:2019-06-13
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