Surface-modified glass and polymer membrane interfaces form high-electrical resistance seals that can be used in microfluidic valves and array devices tailored for electrophysiological measurements. The incorporation of high seal resistance valves into the array device allows only the desired electrophysiological signal to be detected by a patch clamp amplifier, enabling parallel experiments with one patch clamp amplifier, which can greatly improve the cost efficiency. To achieve the desired high seal resistance, surface modification was performed on the glass components to increase the interaction between the glass and the membrane surfaces. The valves exhibit seal resistance of >500 GΩ after modification, which is 100× higher than reported for unmodified valves.