- Patent Title: Method and apparatus for deriving a topography of an object surface
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Application No.: US15753177Application Date: 2015-08-17
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Publication No.: US11248899B2Publication Date: 2022-02-15
- Inventor: Lars Bååth
- Applicant: QSO Interferometer Systems AB
- Applicant Address: SE Halmstad
- Assignee: QSO Interferometer Systems AB
- Current Assignee: QSO Interferometer Systems AB
- Current Assignee Address: SE Halmstad
- Agency: Renner, Otto, Boisselle & Sklar, LLP
- International Application: PCT/EP2015/068844 WO 20150817
- International Announcement: WO2017/028896 WO 20170223
- Main IPC: G01B9/02
- IPC: G01B9/02 ; G01B11/24 ; G06T7/564 ; G06T7/521 ; G06T7/60

Abstract:
The embodiments herein relate to a method for deriving topography of an object surface. A linearly polarized light wave is directed towards the object surface and a reference surface. Images of reflected linearly polarized light wave for a plurality of wavelengths are obtained. The images are obtained for at least four polarizations for each of the plurality of wavelengths. The reflected linearly polarized light wave is a reflection of the linearly polarized light wave directed towards the object surface and the reference surface. The topography of the object surface based on the obtained images is obtained.
Public/Granted literature
- US20180238676A1 METHOD AND APPARATUS FOR DERIVING A TOPOGRAPHY OF AN OBJECT SURFACE Public/Granted day:2018-08-23
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