Invention Grant
- Patent Title: Systems and methods for real time measurement of surface curvature and thermal expansion of small samples
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Application No.: US16499588Application Date: 2018-03-26
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Publication No.: US11248904B2Publication Date: 2022-02-15
- Inventor: Alexei Ermakov , Xiuyan Li , Eric Garfunkel , Leonard C. Feldman , Torgny Gustafsson
- Applicant: Rutgers, The State University of New Jersey
- Applicant Address: US NJ New Brunswick
- Assignee: Rutgers, The State University of New Jersey
- Current Assignee: Rutgers, The State University of New Jersey
- Current Assignee Address: US NJ New Brunswick
- Agency: Fox Rothschild LLP
- International Application: PCT/US2018/024266 WO 20180326
- International Announcement: WO2018/183153 WO 20181004
- Main IPC: G01B11/24
- IPC: G01B11/24 ; G01B11/255 ; G06T7/521

Abstract:
Systems and methods for measuring a curvature radius of a sample. The methods comprise: emitting a light beam from a laser source in a direction towards a beam expander; expanding a size of the light beam emitted from the laser source to create a broad laser beam; reflecting the broad laser beam off of a curved surface of the sample; creating a plurality of non-parallel laser beams by passing the reflected broad laser beam through a grating mask or a biprism; using the plurality of non-parallel laser beams to create an interference pattern at a camera image sensor; capturing a first image by the camera image sensor; and processing the first image by an image processing device to determine the curvature radius of the sample.
Public/Granted literature
- US11221210B2 Systems and methods for real time measurement of surface curvature and thermal expansion of small samples Public/Granted day:2022-01-11
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