Invention Grant
- Patent Title: Apparatus for inspecting object surface
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Application No.: US17079668Application Date: 2020-10-26
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Publication No.: US11249028B2Publication Date: 2022-02-15
- Inventor: Takahiro Kamikawa , Hiroshi Ohno , Takehiro Hato
- Applicant: Kabushiki Kaisha Toshiba
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
- Priority: JPJP2018-004536 20180115
- Main IPC: G01N21/88
- IPC: G01N21/88 ; G01N21/47

Abstract:
An apparatus for inspecting object surface according to an embodiment includes: an imaging device including an imaging area; an optical source; and a group of optical devices including a mirror and a lens, and causing a reflected light other than a regular reflection light from an object to be reflected by a mirror surface of the mirror, and to form an image in the imaging area of the imaging device through the lens, the regular reflection light being caused by a light incident to a surface of the object from the optical source, wherein the optical source, the mirror, the lens, and the imaging device are arranged in such a manner that the regular reflection light is not incident to the imaging area of the imaging device through the mirror and the lens.
Public/Granted literature
- US20210041372A1 APPARATUS FOR INSPECTING OBJECT SURFACE Public/Granted day:2021-02-11
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