Invention Grant
- Patent Title: Bulk acoustic wave resonator based sensor
-
Application No.: US16336197Application Date: 2017-09-25
-
Publication No.: US11249049B2Publication Date: 2022-02-15
- Inventor: Marina Cole , Julian Gardner , Farah Villa Lopez , Sanju Thomas
- Applicant: The University of Warwick
- Applicant Address: GB Coventry
- Assignee: The University of Warwick
- Current Assignee: The University of Warwick
- Current Assignee Address: GB Coventry
- Agency: NK Patent Law
- Priority: GB1616271 20160926
- International Application: PCT/GB2017/052866 WO 20170925
- International Announcement: WO2018/055414 WO 20180329
- Main IPC: G01N29/02
- IPC: G01N29/02 ; G01N29/036 ; H03H9/17
Abstract:
An integrated circuit is disclosed. The integrated circuit comprises a silicon substrate, a sensor comprising a bulk acoustic wave resonator and an acoustic mirror disposed between the bulk acoustic wave resonator and the substrate, and a CMOS circuit supported by substrate and operatively connected to the sensor.
Public/Granted literature
- US20190212300A1 BULK ACOUSTIC WAVE RESONATOR BASED SENSOR Public/Granted day:2019-07-11
Information query
