Invention Grant
- Patent Title: Test apparatus and testing method using the same
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Application No.: US16837906Application Date: 2020-04-01
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Publication No.: US11249131B2Publication Date: 2022-02-15
- Inventor: Harry-Hak-Lay Chuang , Tien-Wei Chiang , Chia Yu Wang , Meng-Chun Shih , Ching-Huang Wang , Chih-Yang Chang , Chia-Hsiang Chen , Chih-Hui Weng
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Current Assignee Address: TW Hsinchu
- Agency: WPAT, P.C., Intellectual Property Attorneys
- Agent Anthony King
- Main IPC: G01R31/02
- IPC: G01R31/02 ; G01R31/26 ; G01R31/28 ; H01L21/66

Abstract:
A test apparatus includes a tray including at least a first region and a second region, and a cap disposed over the tray. The cap includes a cap body, and at least a first magnet and a second magnet disposed over the cap body. The first magnet is configured to provide a first magnetic field to the first region of the tray, and the second magnet is configured to provide a second magnetic field to the second region of the tray. A strength of the first magnetic field is different from a strength of the second magnetic field.
Public/Granted literature
- US20210311105A1 TEST APPARATUS AND TESTING METHOD USING THE SAME Public/Granted day:2021-10-07
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