Invention Grant
- Patent Title: Carrier for a semiconductor structure
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Application No.: US16080279Application Date: 2017-02-23
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Publication No.: US11251265B2Publication Date: 2022-02-15
- Inventor: Christophe Figuet , Oleg Kononchuk , Kassam Alassaad , Gabriel Ferro , Véronique Souliere , Christelle Veytizou , Taguhi Yeghoyan
- Applicant: Centre National de la Recherche Scientifique , Universite Claude Bernard Lyon 1 , Soitec
- Applicant Address: FR Paris; FR Villeurbanne; FR Bernin
- Assignee: Centre National de la Recherche Scientifique,Universite Claude Bernard Lyon 1,Soitec
- Current Assignee: Centre National de la Recherche Scientifique,Universite Claude Bernard Lyon 1,Soitec
- Current Assignee Address: FR Paris; FR Villeurbanne; FR Bernin
- Agency: TraskBritt
- Priority: FR1651642 20160226
- International Application: PCT/FR2017/050400 WO 20170223
- International Announcement: WO2017/144821 WO 20170831
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L21/02 ; H01L21/762 ; H01L29/16

Abstract:
A support for a semiconductor structure includes a charge-trapping layer on a base substrate. The charge-trapping layer consists of a polycrystalline main layer and, interposed in the main layer or between the main layer and the base substrate, at least one intermediate polycrystalline layer composed of a silicon and carbon alloy or carbon. The intermediate layer has a resistivity greater than 1000 ohm·cm.
Public/Granted literature
- US20190058031A1 CARRIER FOR A SEMICONDUCTOR STRUCTURE Public/Granted day:2019-02-21
Information query
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