Invention Grant
- Patent Title: Image acquisition device, image acquisition method and inspection apparatus
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Application No.: US16962782Application Date: 2018-11-08
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Publication No.: US11252317B2Publication Date: 2022-02-15
- Inventor: Yasushi Sasa
- Applicant: SCREEN HOLDINGS CO., LTD.
- Applicant Address: JP Kyoto
- Assignee: SCREEN HOLDINGS CO., LTD.
- Current Assignee: SCREEN HOLDINGS CO., LTD.
- Current Assignee Address: JP Kyoto
- Agency: McDermott Will & Emery LLP
- Priority: JPJP2018-018125 20180205
- International Application: PCT/JP2018/041491 WO 20181108
- International Announcement: WO2019/150693 WO 20190808
- Main IPC: H04N5/225
- IPC: H04N5/225 ; G01N21/88 ; H04N5/262 ; H04N7/18

Abstract:
A mover moves an object in a first direction. A plurality of partial images of the object are obtained by switching N (N is a natural number equal to or greater than 2) light sources while moving the object. An image of the object is obtained by deleting a part according to the switching order of the light sources from a composite image obtained by combining the plurality of partial images for each light source. As a result, as many images of the object illuminated only by one of the N light sources as the N light sources, i.e. N images of the object, are obtained.
Public/Granted literature
- US11283981B2 Image acquisition device, image acquisition method and inspection apparatus Public/Granted day:2022-03-22
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