Metal complexes for depositing films and method of making and using the same
Abstract:
Provided herein are methods of catalytic hydrosilylation, including triggerable methods, using metal-ligand complexes as catalysts, characterized by formula MLxDy; wherein: M is a metal; x is equal to the oxidation state of M; each D is independently a neutral coordinating ligand; y is zero or an integer selected from the range of 1 to 4; and each L is independently a mono-anionic ligand. L may be a η1,η2-β,β-disubstituted-ω-alkenyl ligand.
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