Invention Grant
- Patent Title: Wafer dividing apparatus
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Application No.: US16701884Application Date: 2019-12-03
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Publication No.: US11254029B2Publication Date: 2022-02-22
- Inventor: Takayuki Masada , Yoshihiro Kawaguchi , Tomohito Matsuda , Yuhei Fujii , Susumu Inakazu , Ryota Saito , Naoya Takesue , Hideaki Ishida
- Applicant: DISCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: DISCO CORPORATION
- Current Assignee: DISCO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Greer, Burns & Crain, Ltd.
- Priority: JPJP2018-227203 20181204
- Main IPC: B28D5/00
- IPC: B28D5/00 ; H01L21/683 ; H01L21/67

Abstract:
A wafer dividing apparatus for dividing a wafer stuck to an adhesive tape and supported at an opening of a frame into individual chips along a scheduled division line is provided. The wafer dividing apparatus includes a cassette table movable upwardly and downwardly in a Z axis direction, a first carry-out/in unit that carries out the frame from the cassette placed on the cassette table or carry in the frame to the cassette, a first temporary receiving unit including a pair of first guide rails extending in the X axis direction and a guide rail opening/closing portion that increases the distance between the pair of first guide rails, a reversing unit including a holding portion that holds the frame and rotates by 180 degrees to reverse the front and back of the frame, and a transport unit that moves the reversed frame.
Public/Granted literature
- US20200171707A1 WAFER DIVIDING APPARATUS Public/Granted day:2020-06-04
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