Invention Grant
- Patent Title: FET based sensory systems
-
Application No.: US15911133Application Date: 2018-03-04
-
Publication No.: US11254559B2Publication Date: 2022-02-22
- Inventor: Kris Vossough , Farhang Yazdani
- Applicant: Kris Vossough , Farhang Yazdani
- Applicant Address: US CA Palo Alto; US CA San Jose
- Assignee: Kris Vossough,Farhang Yazdani
- Current Assignee: Kris Vossough,Farhang Yazdani
- Current Assignee Address: US CA Palo Alto; US CA San Jose
- Agency: Aslan Law, P.C.
- Main IPC: G01P15/12
- IPC: G01P15/12 ; B81B3/00 ; G01P15/08 ; G01L9/00 ; G01N33/00 ; H01L29/06 ; H01L29/84 ; H04R19/04 ; H04R19/00 ; G01C19/5712 ; H04R23/00 ; G01C19/5783 ; B82Y15/00 ; H01L29/16 ; H01L29/20 ; H01L51/00 ; H01L29/775

Abstract:
This invention describes the structure and function of an integrated multi-sensing system. Integrated systems described herein may be configured to form a microphone, pressure sensor, gas sensor, multi-axis gyroscope or accelerometer. The sensor uses a variety of different Field Effect Transistor technologies (horizontal, vertical, Si nanowire, CNT, SiC and III-V semiconductors) in conjunction with MEMS based structures such as cantilevers, membranes and proof masses integrated into silicon substrates. It also describes a configurable method for tuning the integrated system to specific resonance frequency using electronic design.
Public/Granted literature
- US20180186623A1 FET BASED SENSORY SYSTEMS Public/Granted day:2018-07-05
Information query
IPC分类: