Invention Grant
- Patent Title: Apparatus for depositing metal film on surface of three-dimensional object
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Application No.: US16563934Application Date: 2019-09-09
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Publication No.: US11255014B2Publication Date: 2022-02-22
- Inventor: Kun Ho Song
- Applicant: TETOS Co., Ltd.
- Applicant Address: KR Asan-si
- Assignee: TETOS Co., Ltd.
- Current Assignee: TETOS Co., Ltd.
- Current Assignee Address: KR Asan-si
- Agency: Revolution IP, PLLC
- Priority: KR10-2018-0116744 20181001
- Main IPC: C23C14/50
- IPC: C23C14/50 ; C23C14/14 ; C23C14/34 ; H01L23/552

Abstract:
An apparatus for depositing a metal film on a surface of a three-dimensional object, includes a mounting drum rotatably disposed inside a chamber and having a circumferential surface onto which a plurality of three-dimensional objects is settled and mounted making each surface thereof to be subjected to deposition be exposed to an outside; and at least one source target depositing a metal film onto the surface of the three-dimensional object mounted to the mounting drum by sputtering.
Information query
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