Invention Grant
- Patent Title: Differential sinusoidal phase modulation laser interferometric nanometer displacement measuring apparatus and method
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Application No.: US17256011Application Date: 2019-09-04
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Publication No.: US11255655B2Publication Date: 2022-02-22
- Inventor: Liping Yan , Benyong Chen , Yingtian Lou , Jiandong Xie
- Applicant: ZHEJIANG SCI-TECH UNIVERSITY
- Applicant Address: CN Zhejiang
- Assignee: ZHEJIANG SCI-TECH UNIVERSITY
- Current Assignee: ZHEJIANG SCI-TECH UNIVERSITY
- Current Assignee Address: CN Zhejiang
- Agency: JCIPRNET
- Priority: CN201910681897.1 20190726
- International Application: PCT/CN2019/104314 WO 20190904
- International Announcement: WO2021/017098 WO 20210204
- Main IPC: G01B9/02
- IPC: G01B9/02 ; G01B11/14

Abstract:
The disclosure discloses a differential sinusoidal phase modulation laser interferometric nanometer displacement measuring apparatus and method. The beam output from the single-frequency laser is converted into a 45° linearly polarized beam after passing through the polarizer, then projected onto two sets of sinusoidal phase modulation interferometers consisting of the beam splitter, the electro-optic phase modulator, the half wave plate, three pyramid prisms, two polarization beam splitters, thereby forming measurement and reference interference signals which are received by two photodetectors. A high-frequency sinusoidal voltage signal is applied to the electro-optic phase modulator placed in the common reference arm of the two interferometers, thereby modulating the interference signal into a high-frequency AC signal. By detecting the difference between the phase change amounts of the two interference signals when the measured object moves, the measured displacement can be obtained.
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