Invention Grant
- Patent Title: Light detector
-
Application No.: US16468070Application Date: 2017-11-30
-
Publication No.: US11255730B2Publication Date: 2022-02-22
- Inventor: Masahiro Yamazaki , Katsumi Shibayama , Ryusuke Kitaura
- Applicant: HAMAMATSU PHOTONICS K.K.
- Applicant Address: JP Hamamatsu
- Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee Address: JP Hamamatsu
- Agency: Faegre Drinker Biddle & Reath LLP
- Priority: JPJP2016-242465 20161214
- International Application: PCT/JP2017/043171 WO 20171130
- International Announcement: WO2018/110309 WO 20180621
- Main IPC: G01J5/24
- IPC: G01J5/24 ; G01J5/02 ; H01L31/0232 ; H01L31/09

Abstract:
A light detector includes: a substrate; and a membrane which is supported on a surface of the substrate so that a space is formed between the surface of the substrate and the membrane, in which the membrane includes a first wiring layer and a second wiring layer which are opposite each other with a gap extending along a line having a curved portion interposed therebetween and a resistance layer which is electrically connected to each of the first wiring layer and the second wiring layer and has an electric resistance depending on a temperature, and in which a first edge portion at the side of the line in the first wiring layer and a second edge portion at the side of the line in the second wiring layer respectively continuously extend.
Public/Granted literature
- US20200072677A1 LIGHT DETECTOR Public/Granted day:2020-03-05
Information query