Invention Grant
- Patent Title: Measurement apparatus and measurement method
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Application No.: US16549888Application Date: 2019-08-23
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Publication No.: US11255969B2Publication Date: 2022-02-22
- Inventor: Shinji Komatsuzaki
- Applicant: Mitutoyo Corporation
- Applicant Address: JP Kanagawa
- Assignee: Mitutoyo Corporation
- Current Assignee: Mitutoyo Corporation
- Current Assignee Address: JP Kanagawa
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JPJP2018-156327 20180823,JPJP2019-134430 20190722
- Main IPC: G01C3/08
- IPC: G01C3/08 ; G01S17/34 ; G01S7/4915 ; G01S7/4861

Abstract:
A measurement apparatus including a laser apparatus; a branching part that branches the frequency modulated laser beam into a reference light and a measurement light; a beat signal generation part that generates a beat signal by mixing the reflected light reflected by irradiating the measurement light to an object to be measured; and a detection part that performs frequency analysis on first sampling data generated by sampling the beat signal at a first frequency and second sampling data generated by sampling the beat signal at a second frequency obtained by dividing a resonance frequency of the laser resonator by a positive integer, wherein the first frequency is a frequency equal to the resonance frequency or being a frequency equal to or more than twice the resonance frequency of the laser resonator and a measurement method are provided.
Public/Granted literature
- US20200064477A1 MEASUREMENT APPARATUS AND MEASUREMENT METHOD Public/Granted day:2020-02-27
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