Measurement apparatus and measurement method
Abstract:
A measurement apparatus including a laser apparatus; a branching part that branches the frequency modulated laser beam into a reference light and a measurement light; a beat signal generation part that generates a beat signal by mixing the reflected light reflected by irradiating the measurement light to an object to be measured; and a detection part that performs frequency analysis on first sampling data generated by sampling the beat signal at a first frequency and second sampling data generated by sampling the beat signal at a second frequency obtained by dividing a resonance frequency of the laser resonator by a positive integer, wherein the first frequency is a frequency equal to the resonance frequency or being a frequency equal to or more than twice the resonance frequency of the laser resonator and a measurement method are provided.
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