Invention Grant
- Patent Title: Resist composition, and method of forming resist pattern
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Application No.: US16421125Application Date: 2019-05-23
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Publication No.: US11256169B2Publication Date: 2022-02-22
- Inventor: Takuya Ikeda , Nobuhiro Michibayashi , Mari Murata , Hiroto Yamazaki , Masatoshi Arai , Yoshitaka Komuro
- Applicant: TOKYO OHKA KOGYO CO., LTD.
- Applicant Address: JP Kawasaki
- Assignee: TOKYO OHKA KOGYO CO., LTD.
- Current Assignee: TOKYO OHKA KOGYO CO., LTD.
- Current Assignee Address: JP Kawasaki
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: JPJP2018-101871 20180528,JPJP2018-101874 20180528,JPJP2018-101875 20180528,JPJP2018-101880 20180528
- Main IPC: G03F7/004
- IPC: G03F7/004 ; G03F7/32 ; C08L33/14 ; C08L25/08 ; G03F7/20

Abstract:
A resist composition containing a resin component having a structural unit containing a group which is dissociated under the action of an acid and compound represented by the general formula (bd1). In the formula (bd1), Rx1 to Rx4 represent a hydrocarbon group or a hydrogen atom or may be mutually bonded to form a ring structure, Ry1 to Ry2 represent a hydrocarbon group or a hydrogen atom or may be mutually bonded to form a ring structure, and Rz1 to Rz4 represent a hydrocarbon group or a hydrogen atom or may be mutually bonded to form a ring structure. At least one of Rx1 to Rx4, Ry1 to Ry2 and Rz1 to Rz4 has an anion group, the entire anion moiety may be an n-valent anion, and Mm+ represents an m-valent organic cation
Information query
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