Invention Grant
- Patent Title: Characterization system and method with guided defect discovery
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Application No.: US16847367Application Date: 2020-04-13
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Publication No.: US11256967B2Publication Date: 2022-02-22
- Inventor: Bradley Ries , Tommaso Torelli , Muthukrishnan Sankar , Vineethanand Hariharan
- Applicant: KLA Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA Corporation
- Current Assignee: KLA Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- Main IPC: G06K9/62
- IPC: G06K9/62 ; G06K9/66 ; G06T7/00 ; G01N21/88

Abstract:
A system is disclosed, in accordance with one or more embodiment of the present disclosure. The system may include a controller including one or more processors configured to execute a set of program instructions. The set of program instructions may be configured to cause the processors to: receive images of a sample from a characterization sub-system; identify target clips from patch clips; prepare processed clips based on the target clips; generate encoded images by transforming the processed clips; sort the encoded images into a set of clusters; display sorted images from the set of clusters; receive labels for the displayed sorted images; determine whether the received labels are sufficient to train a deep learning classifier; and upon determining the received labels are sufficient to train the deep learning classifier, train the deep learning classifier via the displayed sorted images and the received labels.
Public/Granted literature
- US20210232872A1 Characterization System and Method With Guided Defect Discovery Public/Granted day:2021-07-29
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