Invention Grant
- Patent Title: Defect inspection system for specimen and defect inspection method for specimen
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Application No.: US16553920Application Date: 2019-08-28
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Publication No.: US11257208B2Publication Date: 2022-02-22
- Inventor: Seong-keun Ha
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: Lewis Roca Rothgerber Christie LLP
- Priority: KR10-2018-0138795 20181113
- Main IPC: G06T7/00
- IPC: G06T7/00 ; G06T3/40

Abstract:
A defect inspection system for a specimen includes an image sensor and a defect inspection device. The image sensor is configured to capture a target image of the specimen that includes a flat portion and a curved portion extending from the flat portion along a first direction and having a curvature. The target image includes a first area corresponding to the flat portion of the specimen and a second area corresponding to the curved portion of the specimen. The defect inspection device is configured to determine a defect of the specimen based on the target image. The defect inspection device includes an image editor that is configured to enlarge a width of the second area along the first direction by a resize ratio.
Public/Granted literature
- US20200151862A1 DEFECT INSPECTION SYSTEM FOR SPECIMEN AND DEFECT INSPECTION METHOD FOR SPECIMEN Public/Granted day:2020-05-14
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