Invention Grant
- Patent Title: Work function design to increase density of nanosheet devices
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Application No.: US16874907Application Date: 2020-05-15
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Publication No.: US11257815B2Publication Date: 2022-02-22
- Inventor: Mao-Lin Huang , Chih-Hao Wang , Kuo-Cheng Chiang , Jia-Ni Yu , Lung-Kun Chu , Chung-Wei Hsu
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L27/088
- IPC: H01L27/088 ; H01L29/06 ; H01L29/423 ; H01L29/49 ; H01L29/786 ; H01L21/02 ; H01L21/8234 ; H01L29/66

Abstract:
In some embodiments, the present disclosure relates to an integrated chip including first, second, and third nanosheet field effect transistors (NSFETs) arranged over a substrate. The first NSFET has a first threshold voltage and includes first nanosheet channel structures embedded in a first gate electrode layer. The first nanosheet channel structures extend from a first source/drain region to a second source/drain region. The second NSFET has a second threshold voltage different than the first threshold voltage and includes second nanosheet channel structures embedded in a second gate electrode layer. The second nanosheet channel structures extend from a third source/drain region to a fourth source/drain region. The third NSFET has a third threshold voltage different than the second threshold voltage and includes third nanosheet channel structures embedded in a third gate electrode layer. The third nanosheet channel structures extend from a fifth source/drain region to a sixth source/drain region.
Public/Granted literature
- US20210134794A1 WORK FUNCTION DESIGN TO INCREASE DENSITY OF NANOSHEET DEVICES Public/Granted day:2021-05-06
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