Invention Grant
- Patent Title: Transistor devices and methods of forming transistor devices
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Application No.: US16874708Application Date: 2020-05-15
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Publication No.: US11257949B2Publication Date: 2022-02-22
- Inventor: Bong Woong Mun , Jeoung Mo Koo
- Applicant: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Current Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Current Assignee Address: SG Singapore
- Agency: Viering Jentschura & Partner MBB
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/78 ; H01L21/26 ; H01L21/28 ; H01L29/06 ; H01L29/10 ; H01L21/265 ; H01L21/285 ; H01L29/45

Abstract:
An LDMOS transistor device may be provided, including a substrate having a conductivity region arranged therein, a first isolation structure arranged within the substrate, a source region and a drain region arranged within the conductivity region, a second isolation (local isolation) structure arranged between the source region and the drain region, and a gate structure arranged at least partially within the second isolation structure. The first isolation structure may extend along at least a portion of a border of the conductivity region, and a depth of the second isolation structure may be less than a depth of the first isolation structure. In use, a channel for electron flow may be formed along at least a part of a side of the gate structure arranged within the second isolation (local isolation) structure.
Public/Granted literature
- US20210359132A1 TRANSISTOR DEVICES AND METHODS OF FORMING TRANSISTOR DEVICES Public/Granted day:2021-11-18
Information query
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