- Patent Title: Mask cassette alignment device and method of aligning mask cassette
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Application No.: US16679008Application Date: 2019-11-08
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Publication No.: US11258015B2Publication Date: 2022-02-22
- Inventor: Kwangbok Park , Eojin Shin
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: Lewis Roca Rothgerber Christie LLP
- Priority: KR10-2018-0138905 20181113
- Main IPC: H01L21/673
- IPC: H01L21/673 ; H01L21/68 ; H01L51/00 ; H01L51/56
Abstract:
A mask cassette alignment device includes: a first plate having a circular shape; and a first guide unit engaged with a side surface of the first plate and configured to rotate the first plate.
Public/Granted literature
- US20200152878A1 MASK CASSETTE ALIGNMENT DEVICE AND METHOD OF ALIGNING MASK CASSETTE Public/Granted day:2020-05-14
Information query
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