Method and circuit for operating a piezoelectric MEMS sound transducer and integrated circuit comprsing such a circuit
Abstract:
A method is provided for operating a piezoelectric MEMS sound transducer in the audible wavelength spectrum and/or in the ultrasonic range. The method includes storing electrical energy in an energy store and indirectly transferring this electrical energy via a transfer unit between the energy store and the piezoelectric MEMS sound transducer. In a first switching state, the transfer unit is first of all charged from the energy store. In a second switching state, the transfer unit is discharged and the piezoelectric MEMS sound transducer is charged. In a third switching state, the piezoelectric MEMS sound transducer is discharged and the transfer unit is charged. In a fourth switching state, the transfer unit is then discharged and the energy store is charged.
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