Invention Grant
- Patent Title: Polishing apparatus and polishing method
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Application No.: US16567239Application Date: 2019-09-11
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Publication No.: US11260499B2Publication Date: 2022-03-01
- Inventor: Taro Takahashi , Yuta Suzuki
- Applicant: EBARA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: EBARA CORPORATION
- Current Assignee: EBARA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: BakerHostetler
- Priority: JP2015-204767 20151016,JP2016-164343 20160825
- Main IPC: B24B37/20
- IPC: B24B37/20 ; B24B37/005 ; B24B37/04 ; B24B37/013 ; B24B49/10

Abstract:
A polishing apparatus 100 includes a first electric motor 14 that rotationally drives a polishing table 12, and a second electric motor 22 that rotationally drives a top ring 20 that holds a semiconductor wafer 18. The polishing apparatus 100 includes: a current detection portion 24; an accumulation portion 110 that accumulates, for a prescribed interval, current values of three phases that are detected by the current detection portion 24; a difference portion 112 that determines a difference between a detected current value in an interval that is different to the prescribed interval and the accumulated current value; and an endpoint detection portion 29 that detects a polishing endpoint that indicates the end of polishing of the surface of the semiconductor wafer 18, based on a change in the difference that the difference portion 112 outputs.
Public/Granted literature
- US20200001428A1 POLISHING APPARATUS AND POLISHING METHOD Public/Granted day:2020-01-02
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