Invention Grant
- Patent Title: MEMS actuation systems and methods
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Application No.: US15699137Application Date: 2017-09-08
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Publication No.: US11261081B2Publication Date: 2022-03-01
- Inventor: Matthew Ng , Xiaolei Liu
- Applicant: MEMS Drive (Nanjing) Co., Inc.
- Applicant Address: CN Nanjing
- Assignee: MEMS Drive (Nanjing) Co., Inc.
- Current Assignee: MEMS Drive (Nanjing) Co., Inc.
- Current Assignee Address: CN Nanjing
- Agency: Holland & Knight LLP
- Agent Brian J. Colandreo; Michael T. Abramson
- Main IPC: B81B3/00
- IPC: B81B3/00 ; H04N5/225

Abstract:
A micro-electrical-mechanical system (MEMS) assembly includes a stationary stage, a rigid stage, at least one flexure configured to slidably couple the stationary stage and the rigid stage, at least one flexible electrode coupled and essentially orthogonal to one of the stationary stage and the rigid stage, and at least one rigid electrode coupled and essentially orthogonal to the other of the stationary stage and the rigid stage.
Public/Granted literature
- US20180076738A1 MEMS Actuation Systems and Methods Public/Granted day:2018-03-15
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