Invention Grant
- Patent Title: Roll-to-roll surface treatment device, and film deposition method and film deposition device using same
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Application No.: US16327264Application Date: 2017-08-23
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Publication No.: US11261520B2Publication Date: 2022-03-01
- Inventor: Hideharu Okami
- Applicant: SUMITOMO METAL MINING CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: SUMITOMO METAL MINING CO., LTD.
- Current Assignee: SUMITOMO METAL MINING CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Locke Lord LLP
- Agent James E. Armstrong, IV; Nicholas J. DiCeglie, Jr.
- Priority: JPJP2016-162787 20160823
- International Application: PCT/JP2017/030065 WO 20170823
- International Announcement: WO2018/038141 WO 20180301
- Main IPC: C23C14/56
- IPC: C23C14/56 ; H05K3/16 ; H05K3/00 ; C23C16/54 ; C23C14/34

Abstract:
Disclosed herein is a roll-to-roll long base material surface processing device capable of performing surface processing on a long base material with little occurrence of wrinkling in the long base material at low costs. The surface processing device includes: two can rolls that cool a long resin film transferred in a roll-to-roll manner in a vacuum chamber with a cooling medium circulated therein by wrapping the long resin film around outer circumferences thereof; and surface processing units typified by magnetron sputtering cathodes provided so as to face the outer circumferences of the two can rolls, wherein a second can roll of the two can rolls other than a most upstream first can roll has a gas release mechanism that releases a gas from the outer circumference.
Public/Granted literature
- US20190226080A1 ROLL-TO-ROLL SURFACE TREATMENT DEVICE, AND FILM DEPOSITION METHOD AND FILM DEPOSITION DEVICE USING SAME Public/Granted day:2019-07-25
Information query
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