Invention Grant
- Patent Title: Method and apparatus for precursor gas injection
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Application No.: US16991871Application Date: 2020-08-12
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Publication No.: US11261527B2Publication Date: 2022-03-01
- Inventor: Alexander Groholski , Valery Ray , Joseph Favata
- Applicant: MEO Engineering Company, Inc.
- Applicant Address: US MA Methuen
- Assignee: MEO Engineering Company, Inc.
- Current Assignee: MEO Engineering Company, Inc.
- Current Assignee Address: US MA Methuen
- Agency: Greenberg Traurig, LLP
- Agent Roman Fayerberg; Jaime Burke
- Main IPC: C23C16/448
- IPC: C23C16/448 ; C23C16/455

Abstract:
The present disclosure provides a gas injection system that can include a housing configured to hold a plurality of precursor cartridges comprising one or more precursor materials, and a nozzle extending from the housing, the nozzle having a tip configured for insertion into a sample chamber of a material processing apparatus. The precursor cartridges are fluidly connected to the nozzle to selectively deliver one or more precursor gasses to the sample chamber.
Public/Granted literature
- US20210047731A1 METHOD AND APPARATUS FOR PRECURSOR GAS INJECTION Public/Granted day:2021-02-18
Information query
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