- Patent Title: Production method and growth arrangement for producing a bulk SiC single crystal by arranging at least two insulation cylinder components to control a variation in a volume element density
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Application No.: US16791028Application Date: 2020-02-14
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Publication No.: US11261536B2Publication Date: 2022-03-01
- Inventor: Bernhard Ecker , Ralf Mueller , Matthias Stockmeier , Michael Vogel , Arnd-Dietrich Weber
- Applicant: SI CRYSTAL GMBH
- Applicant Address: DE Nuremberg
- Assignee: SI CRYSTAL GMBH
- Current Assignee: SI CRYSTAL GMBH
- Current Assignee Address: DE Nuremberg
- Agent Laurence A. Greenberg; Werner H. Stemer; Ralph E. Locher
- Priority: EP19158315 20190220
- Main IPC: C30B23/06
- IPC: C30B23/06 ; C23C14/06 ; C23C14/24 ; C30B29/36

Abstract:
A bulk SiC single crystal is produced by placing an SiC seed crystal in a crystal growth region of a growth crucible, and introducing SiC source material into an SiC reservoir region, and the bulk SiC single crystal is grown on from an SiC growth gas phase by deposition. The growth crucible is surrounded by an insulation that extends rotationally symmetrically and axially towards the central middle longitudinal axis. The insulation has mutually concentric insulation cylinder components and the insulation is notionally divided into insulation ring segments that are in turn notionally divided into volume elements. The insulation cylinder components are selected and positioned relative to one another such that every volume element of the insulation ring segment in question has a volume element density varying by not more than 10% from an average insulation ring segment density of the insulation ring segment in question.
Public/Granted literature
- US20200263318A1 PRODUCTION METHOD AND GROWTH ARRANGEMENT FOR PRODUCING BULK SIC SINGLE CRYSTAL Public/Granted day:2020-08-20
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