Invention Grant
- Patent Title: Shielding member and apparatus for single crystal growth
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Application No.: US16532794Application Date: 2019-08-06
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Publication No.: US11261541B2Publication Date: 2022-03-01
- Inventor: Yohei Fujikawa
- Applicant: SHOWA DENKO K.K.
- Applicant Address: JP Tokyo
- Assignee: SHOWA DENKO K.K.
- Current Assignee: SHOWA DENKO K.K.
- Current Assignee Address: JP Tokyo
- Agency: Sughrue Mion, PLLC
- Priority: JPJP2018-149281 20180808
- Main IPC: C30B23/06
- IPC: C30B23/06 ; C30B35/00 ; C30B29/36

Abstract:
A shielding member placed between a SiC source loading portion and a crystal installation portion in an apparatus for single crystal growth, including a crystal growth container including the loading portion which accommodates a SiC source in an inner bottom portion; a crystal installation portion facing the loading portion, and a heating unit configured to heat the crystal growth container. The device grows a single crystal of the SiC source on a crystal installed on the crystal installation portion by sublimating the SiC source from the loading portion. The shielding member includes a plurality of shielding plates, wherein each area of the plurality of shielding plates is 40% or less of a base area of the crystal growth container. When the SiC source loading portion is filled with a SiC source, a shielding ratio provided by a projection surface of the plurality of shielding plates is 0.5 or more.
Public/Granted literature
- US20200048793A1 SHIELDING MEMBER AND APPARATUS FOR SINGLE CRYSTAL GROWTH Public/Granted day:2020-02-13
Information query
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