Invention Grant
- Patent Title: Wavelength detection device and confocal measurement device
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Application No.: US16970377Application Date: 2019-03-12
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Publication No.: US11262238B2Publication Date: 2022-03-01
- Inventor: Kazuya Kimura , Masayuki Hayakawa
- Applicant: OMRON Corporation
- Applicant Address: JP Kyoto
- Assignee: OMRON Corporation
- Current Assignee: OMRON Corporation
- Current Assignee Address: JP Kyoto
- Agency: JCIPRNET
- Priority: JPJP2018-044588 20180312
- International Application: PCT/JP2019/010010 WO 20190312
- International Announcement: WO2019/176938 WO 20190919
- Main IPC: G01J3/26
- IPC: G01J3/26 ; G01B11/00 ; G01J3/36 ; G01J3/51

Abstract:
The present invention provides a wavelength detection device (10) provided with: a plurality of optical filters (12a, 12b); a splitting unit (11) which splits light and allows the split light to pass through each of the plurality of optical filters (12a, 12b); a plurality of light receiving elements (13a, 13b) which detect the intensities of different beams of light which have passed through the optical filters, respectively; and a calculation unit (16) which calculates, from the outputs of the plurality of light receiving elements, physical quantities related to the transmittances of the plurality of optical filters, and calculates the wavelengths of the beams of light which have passed through the plurality of optical filters, on the basis of the transmittance characteristics, wherein the transmittance characteristics of the plurality of optical filters have an inclination section in different wavelength ranges of the wavelength range of the object to be measured.
Public/Granted literature
- US20210088383A1 WAVELENGTH DETECTION DEVICE AND CONFOCAL MEASUREMENT DEVICE Public/Granted day:2021-03-25
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