Invention Grant
- Patent Title: Inertial sensor, electronic apparatus, and vehicle
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Application No.: US16941797Application Date: 2020-07-29
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Publication No.: US11262377B2Publication Date: 2022-03-01
- Inventor: Satoru Tanaka
- Applicant: Seiko Epson Corporation
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JPJP2019-139498 20190730
- Main IPC: G01P15/08
- IPC: G01P15/08 ; G01P15/125 ; H01G5/16

Abstract:
An inertial sensor includes: a substrate; a moving element swinging about a swing axis along a Y-axis; a detection electrode provided at the substrate, overlapping the moving element as viewed in a plan view from a Z-axis direction orthogonal to the Y-axis, and forming an electrostatic capacitance with the moving element; an exposure part provided at an inner side of the detection electrode and exposing a surface facing the moving element, of the substrate; a protrusion overlapping the moving element as viewed in a plan view from the Z-axis direction and protruding toward the moving element from the exposure part of the substrate; and a covered electrode provided at a top of the protrusion and having a same electric potential as the moving element.
Public/Granted literature
- US20210033639A1 INERTIAL SENSOR, ELECTRONIC APPARATUS, AND VEHICLE Public/Granted day:2021-02-04
Information query
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